Article

Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias.

University of Florida, Department of Electrical and Computer Engineering, Gainesville, Florida 32611-6130, USA.
Journal of Biomedical Optics (impact factor: 3.16). 16(2):026006. DOI:10.1117/1.3533323
Source: PubMed

ABSTRACT We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ± 16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.

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Keywords

acute rat brain tissue
 
experimental results
 
miniature OCT imaging probe
 
miniature probe
 
new MEMS-based endoscopic optical coherence tomography
 
OCT
 
probe size
 
three-dimensional OCT images
 
through-silicon vias
 
time-domain OCT system
 
TSV interconnection enables ultracompact probe design
 
two-axis MEMS mirror
 
Two-dimensional