Article

Studies on Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications.

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University, Beijing, PR China.
Lab on a Chip (impact factor: 5.67). 02/2011; 11(7):1385-8. DOI:10.1039/c0lc00486c
Source: PubMed

ABSTRACT This note introduced a complete fabrication strategy of Parylene C-caulked PDMS (pcPDMS) for low permeability required microfluidics applications. The bonding issue enrolled in the pcPDMS fabrication was solved based on careful surface analyses of the Parylene C caulked status in the PDMS matrix.

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Keywords

careful surface analyses
 
complete fabrication strategy
 
low permeability
 
microfluidics applications
 
Parylene C caulked status
 
Parylene C-caulked PDMS
 

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