Article

Miniature surface-mountable Fabry-Perot pressure sensor constructed with a 45 degrees angled fiber.

Department of Mechanical Engineering, University of Maryland, College Park, Maryland 20742, USA.
Optics Letters (Impact Factor: 3.39). 05/2010; 35(10):1701-3. DOI: 10.1364/OL.35.001701
Source: PubMed

ABSTRACT We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that utilizes the total internal reflection at a 45 degrees angled fiber end face to steer the optical axis by 90 degrees . By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer-metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9-14.2 psi, with a sensitivity of 0.009 microm/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.

1 Bookmark
 · 
71 Views
  • Source
    [Show abstract] [Hide abstract]
    ABSTRACT: We present a micro-electro-mechanical systems (MEMS) based Fabry-Perot (FP) sensor along with an optical system-on-a-chip (SOC) interrogator for simultaneous pressure and temperature sensing. The sensor employs a simple structure with an air-backed silicon membrane cross-axially bonded to a 45° polished optical fiber. This structure renders two cascaded FP cavities, enabling simultaneous pressure and temperature sensing in close proximity along the optical axis. The optical SOC consists of a broadband source, a MEMS FP tunable filter, a photodetector, and the supporting circuitry, serving as a miniature spectrometer for retrieving the two FP cavity lengths. Within the measured pressure and temperature ranges, experimental results demonstrate that the sensor exhibits a good linear response to external pressure and temperature changes.
    Optics Express 09/2013; 21(19):21829-21839. · 3.53 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: Focused ion beam (FIB) machining is a promising technique for the fabrication of micro-optical components with high quality surface finishes. In this work, a prototype of a side aligned optical fibre interferometer was successfully fabricated by the three-dimensional deterministic FIB machining technique. A highly accurate 45° reflective mirror with surface roughness (Ra) of 10 nm has been successfully fabricated at the centre of the fibre to direct the core guided light to the side of the fibre. A surface topography simulation method was developed to simulate the ion beam polishing process. According to the simulation result, a 0.5° offset on the ion beam polishing direction is necessary to maintain the machining accuracy. In the fabrication process, it was also found that for structures requiring a high aspect ratio the existence of an open edge can mitigate against the material redeposition on the sidewalls and therefore increase the overall material removal rate. The fibre has been tested optically and the interference signals have been successfully observed, demonstrating the alignment accuracy of the fabrication method.
    Journal of Micromechanics and Microengineering 09/2013; 23(10):105005. · 1.73 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: We propose an efficient approach to develop large-range liquid level sensors based on an extrinsic Fabry-Perot optical fibre interferometer with an all fused-silica structure and CO2 laser heating fusion bonding technology. The sensor exhibits signatures of a high sensitivity of 5.3 nm/kPa (36.6 nm/psi), a resolution of 6.8 Pa (9.9×10-4 psi) and an extreme low temperature dependence of 0.013 nm/°C. As a result, a high resolution of the water level measurement of approximately 0.7 mm on the length scale of 5 m and small errors of the water pressure measurement induced by the temperature dependence within 0.0025 kPa/°C (0.00036 psi/°C, water level 0.25 mm/°C) are achieved, thus providing useful applications for the detection of the large-range liquid level in harsh environments.
    Optics and Lasers in Engineering 01/2014; · 1.70 Impact Factor

Full-text (2 Sources)

Download
1 Download
Available from
Jan 27, 2015