Article

# Miniature surface-mountable Fabry-Perot pressure sensor constructed with a 45 degrees angled fiber.

Department of Mechanical Engineering, University of Maryland, College Park, Maryland 20742, USA.
(Impact Factor: 3.18). 05/2010; 35(10):1701-3. DOI: 10.1364/OL.35.001701
Source: PubMed

ABSTRACT We present a surface-mountable miniature Fabry-Perot (FP) pressure sensor that utilizes the total internal reflection at a 45 degrees angled fiber end face to steer the optical axis by 90 degrees . By using the fiber as a waveguide, as well as a natural mask in photolithography, an FP cavity is constructed on the sidewall of the fiber. A polymer-metal composite diaphragm is employed as the pressure transducer. The sensor exhibits a good linearity over the pressure range of 1.9-14.2 psi, with a sensitivity of 0.009 microm/psi and a hysteresis of 2.7%. This sensor is expected to impact many fronts that require reliable static pressure measurements of fluids.

### Full-text

Available from: Xuming Zhang, Jan 27, 2015
1 Follower
·
76 Views
• ##### Article: Miniature Temperature Compensated Fabry–Perot Pressure Sensors Created With Self-Aligned Polymer Photolithography Process
[Hide abstract]
ABSTRACT: We present a cross-axial and a co-axial miniature Fabry–Perot pressure sensor fabricated at the tip of an optical fiber with a prewritten Bragg grating by using maskless photolithography process and UV curing polymer process. The optical fiber serves as an intrinsic mask for sensor fabrication as well as a waveguide for sensor interrogation. A polymer-metal composite thin diaphragm is employed as the pressure transducer. The overall sensor size is almost the same as that of a standard single mode optical fiber. Experimental study shows that the sensors exhibit good linearity over a pressure range of 1.9– 9.4 psi , with sensitivities of ${\hbox {0.0094}}~\mu {\hbox {m}}/{\hbox {psi}}$ and ${\hbox {0.0011}}~\mu {\hbox {m}}$psi for the cross-axial and co-axial sensors, respectively. The fiber Bragg grating is exploited for simultaneous temperature measurements or to compensate for temperature effects in pressure readings. The dynamic response of the sensors is also evaluated and discussed. These sensors are expected to impact many fronts that require miniature and inexpensive sensors for reliable static and transient pressure measurements of fluids.
IEEE Sensors Journal 05/2012; 12(5):1566-1573. DOI:10.1109/JSEN.2011.2174439 · 1.85 Impact Factor
• ##### Article: Miniaturization of Bragg-multiplexed membrane transducers
[Hide abstract]
ABSTRACT: This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry–Pérot Bragg grating (FPBG) design that integrally spans a thin (54 µm) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivtiy of 13.5 pm °C−1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold.
Journal of Micromechanics and Microengineering 01/2012; 22(2):025017. DOI:10.1088/0960-1317/22/2/025017 · 1.73 Impact Factor
• ##### Article: Temperature-Insensitive Pressure Sensor Based on All-Fused-Silica Extrinsic Fabry–Pérot Optical Fiber Interferometer
[Hide abstract]
ABSTRACT: A novel high sensitivity pressure sensor based on all-fused-silica extrinsic Fabry–Pérot optical fiber interferometer, which exhibits extreme low temperature dependence, has been developed. The sensor can approach a sensitivity of 5.18 nm/KPa (35.72 nm/psi), a resolution of 38 Pa (0.005 psi). Due to epoxy-free bonding and reserving a vent hole between the fiber and the ferrule in the process of laser heating fusion bonding, the temperature dependence is significantly reduced to the 0.011 ${\rm nm}/^{\circ}{\rm C}$, and pressure measurement error is limited within 0.0021 ${\rm KPa}/^{\circ}{\rm C}$ (0.0003 ${\rm psi}/^{\circ}{\rm C}$). The operating point does not shift with backpressure change due to the vent hole. The sensor is able to be used in the liquid measurement, environmental monitoring, and other industrial applications in harsh environment.
IEEE Sensors Journal 07/2012; 12(7):2425-2429. DOI:10.1109/JSEN.2012.2190056 · 1.85 Impact Factor