Conference Proceeding

Fabrication of 2D and 3D photonic quasi-crystals with high rotation symmetry by holographic lithography technique

Dept. of Phys., Nat. Chung Cheng Univ., Chiayi;
09/2008; DOI:10.1109/OMEMS.2008.4607878 ISBN: 978-1-4244-1917-3 pp.160-161 In proceeding of: Optical MEMs and Nanophotonics, 2008 IEEE/LEOS Internationall Conference on
Source: IEEE Xplore

ABSTRACT We demonstrate using a double-exposure three-beam and/or three-beam-plus-one interference technique, one can easily and efficiently fabricate 2D and/or 3D quasi-periodic structures. Using the multi-surface prism, our fabrication technique becomes a compact and robust way to produce different kinds of structures, periodic or quasi-periodic.

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Keywords

compact
 
different kinds
 
double-exposure three-beam
 
fabricate 2D
 
multi-surface prism
 
robust way
 
three-beam-plus-one interference technique