Conference Paper

Multi-axial micromanipulation organized by versatile micro robots and micro tweezers

Dept. of Mech. Eng. & Intell. Syst., Univ. of Electro-Commun. (UEC), Tokyo
DOI: 10.1109/ROBOT.2008.4543318 Conference: Robotics and Automation, 2008. ICRA 2008. IEEE International Conference on
Source: IEEE Xplore


In this paper, we describe development of the multi-axial micromanipulation organized by versatile micro robots using micro tweezers. To conduct microscopic operations, a unique locomotion mechanism composed of four piezoelectric actuators and two electromagnets is proposed. Here two legs arranged to cross each other are connected by four piezoelectric actuators so that the robot can move in any direction, i.e. in X and Y directions as well as rotate at the specified point precisely in the manner of an inchworm. To manipulate micro objects by these versatile micro robots, we have developed micro tweezers driven by 3 piezoelectric actuators. We have also developed an electromagnetic spherical micromanipulator to position the micro tweezers. The electromagnetic spherical micromanipulator rotates in yaw, roll and pitch directions independently. The electromagnetic spherical micromanipulator is a 1-inch cube size, so we can easily attach them on top of the versatile micro robots. We have developed the multi-axial micromanipulation organized by 3 versatile micro robots with the electromagnetic spherical micromanipulator and micro tweezers. The whole manipulation device is very small, 200 mm in diameter and 70 mm in height, so we can easily attach the device to micro processing instruments even if the working area is very small. This device has 21 DOF with less than 100 nm resolution. In experiments, we have demonstrated flexible handling of miniscule glass spheres with a diameter of 20 mum. We have also succeeded in fixing miniscule glass spheres on a sample table by an ultraviolet cure adhesive. The design procedure, basic performance and micro-assembling applications of this tiny robot are also discussed as part of the new field of micro robotics requiring especially high precision in certain regions.

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Available from: O. Fuchiwaki, May 20, 2014
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    • "Finding industrial applications where the insect-sized robots provide effective benefits is also important. An insect-sized, robotbased manufacturing system has been shown to be effective in the significant downsizing of production instruments and cleanrooms because of the system's wide positioning area with nanoscale positioning resolution [1] [7] [8]. Because they are lightweight, insect-sized robots are also effective in saving energy and reducing vibrations, which occur due to step and repeated motions. "
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    ABSTRACT: In this paper, we describe a newly proposed design of an integrated three-degrees-of-freedom (3DoF) inner position sensor for an omnidirectional and holonomic inchworm mobile mechanism. The mechanism has two Y-shaped electromagnets and six piezoelectric actuators for obtaining 3DoF inchworm motion on well-polished ferromagnetic surfaces. We calculate conversion equations from four measured distances to X-, Y-, and θ-axis motion. We also explain how to make the input signals to realize the minimum time trajectory of free electromagnets with a newly proposed special kinematic model as an additional condition for energy-efficient control. Details of the design and performance are also described to realize flexible, compact, and high-accuracy positioning in precision engineering.
    Robotics and Automation (ICRA), 2013 IEEE International Conference on; 01/2013
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    • "In situ micro processing using microscopy [20], [21] is a feasible application for miniature mobile robots because we can control them using visual feedback from the microscopic image [22], [23]. Recently, we proposed a flexible micro-processing system organized by multiple miniature robots using microscopy [24]-[26]. In these experiments, we concluded that one of the most significant positioning patterns of the miniature robot is a circular motion to keep the tip of a probe within the microscopic monitoring area. "
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    ABSTRACT: In this paper, we describe the design and development of an insect-sized holonomic robot with nanometer resolution. To provide flexible and compact-sized microscopic operations, a unique locomotion mechanism composed of four piezoelectric actuators and two U-shaped electromagnetic legs is proposed. Here, two legs are arranged across from each other and are connected by four piezoelectric actuators so that the mechanism can move in any direction, i.e. in the X- and Y-directions as well as rotation, at a specified point in the manner of an inchworm. In the primary experiments, several performances such as positioning repeatability, resolution, and precise dexterity are checked using a CCD camera-based microscopic image tracker and a capacitive distance sensor. The identification, characteristics, design procedures, and basic performance are addressed and the biomedical, nanoscience, and chip mounting applications of this tiny holonomic robot are discussed to open up a new field of microrobotics for use in precise regions.
    Precision Engineering 01/2013; 37(1):88–106. DOI:10.1016/j.precisioneng.2012.07.004 · 1.52 Impact Factor
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    • "In consideration of adhesional and rolling-resistance factors [16], microspheres were rolled on an Au-coated substrate for both pick and release, thereby causing the fracture of the sphere–substrate interface and the sphere–tool interface, respectively. Similarly, it was also demonstrated that substrates with an ultraviolet-cure adhesive [17] or a gel film [10] were used to facilitate release. Another passive-release technique uses the edge of the substrate to scrape the adhered object off the tool [18]. "
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    ABSTRACT: This paper presents a robotic system that is capable of both picking up and releasing microobjects with high accuracy, reliability, and speed. Due to force-scaling laws, large adhesion forces at the microscale make rapid, accurate release of microobjects a long-standing challenge in micromanipulation, thus representing a hurdle toward automated robotic pick-and-place of micrometer-sized objects. The system employs a novel microelectromechanical systems (MEMS) microgripper with a controllable plunging structure to impact a microobject that gains sufficient momentum to overcome adhesion forces. The performance was experimentally quantified through the manipulation of 7.5-10.9 ??m borosilicate glass spheres in an ambient environment. Experimental results demonstrate that the system, for the first time, achieves a 100% success rate in release (which is based on 700 trials) and a release accuracy of 0.45 ?? 0.24 ??m. High-speed, automated microrobotic pick-and-place was realized by visually recognizing the microgripper and microspheres, by visually detecting the contact of the microgripper with the substrate, and by vision-based control. Example patterns were constructed through automated microrobotic pick-and-place of microspheres, achieving a speed of 6 s/sphere, which is an order of magnitude faster than the highest speed that has been reported in the literature.
    IEEE Transactions on Robotics 03/2010; 26(1-26):200 - 207. DOI:10.1109/TRO.2009.2034831 · 2.43 Impact Factor
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