Article

Optical coherence tomography for process control of laser micromachining

Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077 Göttingen, Germany.
The Review of scientific instruments (Impact Factor: 1.58). 03/2010; 81(3):033705. DOI: 10.1063/1.3356080
Source: PubMed

ABSTRACT In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of approximately 126 nm for surface detection and a lateral resolution <2.5 microm are obtained and the potential of the setup to imaging structures with high aspect ratio is demonstrated.

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