Conference Proceeding

Integration challenge of silicon photonics with microelectronics

Photonics Technol. Lab., Intel Corp., Santa Clara, CA, USA
10/2005; DOI:10.1109/GROUP4.2005.1516389 ISBN: 0-7803-9070-9 pp.20 - 22 In proceeding of: Group IV Photonics, 2005. 2nd IEEE International Conference on
Source: IEEE Xplore

ABSTRACT In this presentation we discuss some practical issues and challenges associated with processing silicon photonic devices in a high volume CMOS manufacturing environment and the challenges of integrating the photonic devices with microelectronics.

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Keywords

integrating
 
practical issues
 
processing silicon photonic devices
 
volume CMOS manufacturing environment
 

M. Paniccia