Conference Paper

Experimental investigations for micro-fabricated folded-waveguide traveling-wave tube oscillators

Scholl of Phys., Seoul Nat. Univ., South Korea
DOI: 10.1109/IVNC.2004.1354928 Conference: Vacuum Nanoelectronics Conference, 2004. IVNC 2004. Technical Digest of the 17th International
Source: IEEE Xplore

ABSTRACT Vacuum tube (folded-waveguide traveling-wave tube oscillator) fabricated by LIGA (deep X-ray lithography: Lithographic, Galvanoformung, Abformung; German acronym) process was successfully developed for the first time.

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