Conference Paper

A multi-step DRIE process for a 128 × 128 micromirror array

Fujitsu Labs. Ltd., Akashi, Japan
DOI: 10.1109/OMEMS.2003.1233463 Conference: Optical MEMS, 2003 IEEE/LEOS International Conference on
Source: IEEE Xplore

ABSTRACT A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This process was used to fabricate a dual-axis 128 × 128 micromirror array with a high resonance frequency.

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