Conference Proceeding

A 4-bit miniature X-band MEMS phase shifter using switched-LC networks

Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
IEEE MTT-S International Microwave Symposium digest. IEEE MTT-S International Microwave Symposium 07/2003; DOI:10.1109/MWSYM.2003.1210415 ISBN: 0-7803-7695-1 pp.1477 - 1480 vol.3 In proceeding of: Microwave Symposium Digest, 2003 IEEE MTT-S International, Volume: 3
Source: IEEE Xplore

ABSTRACT A compact 4-bit true-time-delay MEMS phase shifter fabricated on 8-mil GaAs substrate is described. Miniaturization of the phase shifter is achieved using phase shift networks based on semi-lumped LC circuits and a compact SP2T switch configuration. Trade-off in size and loss is performed to achieve a phase shifter with an area of 7 mm2 and an average insertion loss of -1.47 dB at 9.4 GHz. The phase shifter has a measured return loss of < -10.5 dB over 8-12 GHz and an RMS phase error of 2° at 9.4 GHz.

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Keywords

8-mil GaAs substrate
 
average insertion loss
 
compact 4-bit true-time-delay MEMS phase shifter fabricated
 
compact SP2T
 
phase shift networks
 
phase shifter
 
RMS phase error
 
semi-lumped LC circuits