Conference Proceeding

Fabrication and characterization of a PZT actuated micromirror with two-axis rotational motion for free space optics

Lab. of Devices & Mater., LG Electron. Inst. of Technol., Seoul
02/2001; DOI:10.1109/MEMSYS.2001.906542 ISBN: 0-7803-5998-4 pp.317 - 320 In proceeding of: Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference on
Source: IEEE Xplore

ABSTRACT An actuated micromirror having two-degree of freedom in rotational
motion around the orthogonal axes is designed and fabricated. Suspended
unimorph PZT actuators independently control the rotation of the
micromirror along the two perpendicular axes. The PZT actuators located
symmetrically around the axes of the actuation are mechanically isolated
with each other during their operation by a gimbaled structure. The
mechanical cross talk between each axis of actuation is well suppressed
less than 7% due to the gimbals. The rotation angle θ of the
micromirror reaches 0.75° under the applied bias of 15 V while
maintaining the profile of the reflected laser beam without significant
degradation

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Keywords

actuated micromirror
 
applied bias
 
axes
 
gimbaled structure
 
mechanical
 
micromirror
 
orthogonal axes
 
reflected laser beam
 
rotation
 
rotation angle θ
 
symmetrically
 
two perpendicular axes
 
two-degree
 

Youngjoo Yee