Article

Compact CMOS current conveyor for integrated NEMS resonators

Centro Nac. de Microelectron. - CSIC, Inst. de Microelectron. de Barcelona, Bellaterra
IET Circuits Devices & Systems (impact factor: 0.55). 07/2008; DOI:10.1049/iet-cds:20070320 pp.317 - 323
Source: IEEE Xplore

ABSTRACT A fully integrated nanoelectromechanical system (NEMS) resonator together with a compact built-in complementary metal-oxide-semiconductor (CMOS) interfacing circuitry is presented. The proposed low-power second generation current conveyor circuit allows measuring the mechanical frequency response of the nanocantilever structure in the megahertz range. Detailed experimental results at different DC biasing conditions and pressure levels are presented for a real mixed electromechanical system integrated through a combination of in-house standard CMOS technology and nanodevice post-processing based on nanostencil lithography. The proposed readout circuit can be adapted to operate the nanocantilever in closed loop as a stand-alone oscillator.

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Keywords

different DC biasing conditions
 
in-house standard CMOS technology
 
integrated nanoelectromechanical system
 
mechanical frequency response
 
megahertz range
 
NEMS
 
pressure levels
 
proposed low-power second generation current conveyor circuit
 
real mixed electromechanical system
 
stand-alone oscillator