This dissertation is dedicated to the analysis of the physical mechanism determining the maximal optical power emitted by a III-N based laser diode. The aim of this study is to ascertain which factors affect the optical power of a laser diode and by that, try to increase the maximum optical power of the laser.
The first chapter is an introduction to the subject of the thesis, which begins with a description of the gallium nitride material and its properties (1.1). Then the historical outline of the development of gallium nitride (1.1.1) and optoelectronic devices based on the stimulated emission is presented: the laser diode (1.1.2), distributed feedback laser diode (1.1.3), superluminescent diode (1.1.4), and semiconductor optical amplifier (1.1.5). The next part of the first chapter is dedicated to the description of the radiative and non-radiative recombination processes in the semiconductor material (1.2). After it, the conditions which must be met to obtain optical gain are defined, considering the differences in the density of states in the volume material and quantum wells is and how such a distribution of states modifies the gain spectrum (1.3). After the introduction of the optical amplification, subsection 1.4 presents the basics of the most characteristic element of the laser diode – the optical resonator. In next two subsections, methods of confining the light in both vertical and lateral directions are shown. The next subsection (1.7) presents the physical mechanisms determining the maximum optical power emitted by a laser diode. The analyzed parameters include: power distribution mechanisms in laser diodes, threshold current/threshold current density, slope efficiency, carrier injection efficiency, mirror losses, internal optical losses, leakage of the optical mode into the substrate, thermal resistance and roll-over. The first chapter ends with a subsection describing the principles of the operation of a semiconductor optical amplifier.
The second chapter describes the measurement systems and measurement methods that I have used within this work. Due to the fact that this study consisted, among others, in creating a multifunctional workstation for measuring a number of basic and advanced parameters of laser diodes in various configurations and methods of assembly, the chapter begins with the specification of the requirements that must be met by the workstation. Then, the measurement methods are presented, their possibility and limitation are discussed. These methods include the measurements of: optical power-current-voltage characteristic (2.1), high-resolution electroluminescent spectra (2.2), gain spectra (2.3), stability of the spectrum and tuning laser diodes using the outer cavity (2.4), the thermal resistance (2.5), the near field (2.6) and optical signal amplification by an optical semiconductor amplifier (2.7). In addition, in the case of measurement of the gain spectrum, a detailed description of this method is presented. Also, an extensive analysis of the influence of the measurement system and measurement technique – resulting from hardware limitations (CCD camera noise and the finite resolution of the monochromator) – on the obtained results is carried out. Moreover, subsection 2.3.4 describes the effect of the resonator length on the depth of longitudinal mode oscillation, which is also crucial in measurements of the internal optical losses. The section of the measurement of the gain spectrum ends with a comment and comparison of the Hakki-Paoli method (used here) with other methods of determining the gain spectra.
Although the measurement results are already presented in the first and second chapter, they only serve as an aid in the description of a phenomenon/problem or as an example of a measurement result. The systematic study and analysis of the measurement results is presented starting from the third chapter. Chapter 3 consists of the results of research focused on the influence of the substrate, epitaxial structure and active region design on the optoelectronic parameters of the laser diode. The results are presented in such a way, which reflects the order of decision making, which are done during the growth and processing. The chapter begins with the study of the possibility of thinning the lower AlGaN cladding layer by the use of the substrate with increased concentration of the dopant (3.1). Then, the surprising results of research on the influence of the GaN substrate misorientation on the optoelectrical parameters of the laser diode are presented (3.2). Two cases of the off-cut angle are analyzed: the impact of the native misorientation of the substrate towards m¬-plane and the effect of the off-cut angle obtained by modification of the surface of the substrate towards a-plane. The results show that the off-cut angle has a great impact on the performance of the laser diode. Subsection 3.3 presents the results of the investigation of a unique laser diode structure based on the refractive index gradient. The investigation includes the results obtained by initial design (3.3.1) and in the improved design (3.3.2). In addition, this subsection includes the results of research on epitaxial structures that I proposed for semiconductor optical amplifiers/superluminescent diodes and laser diodes with reduced internal optical losses (3.3.3). Moreover, in subsection 3.3.4, there are results that present the effects of fabrication of the laser diode with an asymmetric waveguide. Subsection 3.4 shows the results of the investigation of the UV-A emitting laser diodes, in which the effect of doping of the lower waveguide on the parameters of the laser diode is tested. Then, in subsection 3.5, the influence of different types of quantum wells on the quantum confined Stark effect and differential gain is analyzed. The next subsection (3.6) contains the results of very important research of the influence of the position of the electron blocking layer in the laser diode structure and the level of doping on the internal optical losses and injection efficiency. The chapter ends with a study of the mechanism of fast degradation of laser diodes emitting in the UV-A range and the comparison of degradation of the MBE and MOVPE grown blue laser diodes, exposed to external laser light with a wavelength of 355 nm. In addition, this section includes a presentation of the unusual degradation of the laser diode mirrors associated with the chlorine contamination.
Chapter 4 is dedicated to the novel III-N-based emitters (distributed feedback laser diodes, tapered laser diodes and semiconductor optical amplifiers). This chapter presents not only the obtained optoelectrical parameters of these innovative and unique devices, but also includes an analysis of additional limitations of the maximum optical power resulting from their unusual design. In the case of distributed feedback laser diodes, their unique feature is the highly stabile completely single-mode emission (longitudinal, vertical and transversal) and an additional limitation is the overlap of the gain spectrum with spectral feedback of the periodic structure. In the case of the taper laser diode, its unique features are high brightness, reduced optical power density on the mirror and single vertical mode. On the other hand, the limitation is the increase in optical losses due to the instability of the cavity associated with the variable geometry of the waveguide. In the case of semiconductor optical amplifiers, a unique feature is the high amplification of the external optical signal and their limitation is the saturation of the gain.
The fifth chapter presents the results of research of the influence of thermal properties on the performance of laser diodes. This chapter begins with the analysis of the influence of the ambient temperature on the parameters of the laser diode (5.1), especially in terms of the T0 and T1 parameters. Moreover, the change of the differential gain and internal optical losses with temperature is also investigated. In the next subsection (5.2), the analysis is dedicated to the thermal properties of multi-emitter laser arrays and the effectiveness and usefulness of such device configuration in terms of the maximum optical power emitted from laser bars. Moreover, subsection 5.2.1 presents a non-trivial example of a problem with non-uniformity of laser array. The next subsection (5.3) includes the results of research on the influence of the geometry of the upper electrical contacts on the maximum optical power emitted by the laser diode. The shape of the upper contact, its thickness and width (but also the chip itself) are analyzed. Subsection 5.4 presents the results and analysis of laser diode parameters for various laser chip lengths and ridge widths. Chapter 5 ends with subsection 5.5 presenting the influence of various housings on the performance of a laser diode.
Chapter 6 summarizes the results of the research work along with the specification of the most interesting and most important results and conclusions.
Almost all research works (measurements/data processing and analysis of results), graphics, diagrams and photos presented in this paper were made by myself. All results that are not authored by me have been used with the consent of the author or authors and each result/analysis has appropriate information on who is the author of the result/analysis. Moreover, I showed the received support in the acknowledgments at the beginning of this thesis. All used quotes contain a relevant reference. In the case of Fig. 1.1b, the scheme is used under a CC BY 4.0 license.