Article

Photonic integration using inductively coupled argon plasma enhanced quantum well intermixing

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore
Electronics Letters (impact factor: 0.96). 01/2003; DOI:10.1049/el:20021112 pp.1672 - 1673
Source: IEEE Xplore

ABSTRACT The capability of photonic integration using inductively coupled argon plasma enhanced quantum well intermixing (ICP-QWI) was demonstrated by fabricating a broad area extended cavity laser. The differential bandgap shift of 86 nm and the passive waveguide loss of 2.98 cm-1 have been obtained. Results indicate high quality of devices processed using the ICP-QWI technique.

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Keywords

cavity laser
 
differential bandgap shift
 
fabricating
 
ICP-QWI
 
ICP-QWI technique
 
inductively
 
passive waveguide loss
 

H.S. Djie