Two-step etching, after the full processes of a silica waveguide, was performed to fabricate a silica-terraced planar lightwave circuit platform for the hybrid integration of optoelectronic devices. Spot-size converted distributed feedback laser diodes (SSC DFB LDs) were flip-chip bonded on silica terraces with the height accuracy of less than 1 μm, and the resultant coupling loss between the SSC DFB LD and the silica waveguide was about 3.78 dB. The light-current curve of the LD flip-chip bonded on the platform showed the almost linear increase of the output power without any saturation.
"A far-field pattern of the LDs was about 10° and 13° in horizontal and vertical directions, respectively. The alignment accuracy of the flip-chip bonding was better than ±1.5 µm, and the height alignment accuracy between the centers of the LD and PLC core was less than 1 µm . Two TFFs were attached to a diced side of the V-shaped waveguides formed on the platform, and the PD carriers were assembled with the platform using the UV-curable epoxy. "
[Show abstract][Hide abstract] ABSTRACT: We have fabricated a planar lightwave circuit (PLC) hybrid-integrated optical sub-assembly of a triplexer using a thin film filter (TFF)-attached wavelength division multiplexer (WDM) and photodiode (PD) carriers. Two types of TFFs were attached to a diced side of a silica-terraced PLC platform, and the PD carriers with a mirror on which pin-PDs were bonded were assembled with the platform. A clear transmitter eye-pattern and minimum receiver sensitivity of -24.5 dBm were obtained under 1.25 Gb/s operation for digital applications, and a second-order inter-modulation distortion (IMD2) of -70 dBc was achieved for an analog receiver.
[Show abstract][Hide abstract] ABSTRACT: A 1.5%-Δ silica directional coupler-type wavelength-division multiplexer dividing 1310/1550-nm wavelength bands was used to develop a bidirectional optical transceiver module. The active devices such as a spot-size converted Fabry-Pe´rot laser diode and waveguide photodetectors were hybridly integrated on a silica-terraced planar lightwave circuit platform. As main performances of the module, the clear eye pattern and the minimum receiver sensitivity of -25.5 dBm were obtained under the full duplex operation at 1.25 Gb/s without a severe power penalty.
[Show abstract][Hide abstract] ABSTRACT: An optical triplex transceiver (TRx) module, which consists of thin-film filter (TFF)-attached wavelength-division multiplexer (WDM) and photodiode (PD) carriers, has been fabricated using a silica planar lightwave circuit (PLC) hybrid integration technology. Two types of TFFs were attached to a diced sidewall of a silica-terraced PLC platform to realize the TFF-attached WDM. The PD carriers with a 45deg mirror, on which receiving surface-illuminated PDs were bonded, were assembled with the PLC platform to form receiver (Rx) parts. As the main performances of the packaged TRx module, a very clear transmitter (Tx) eye pattern and minimum Rx sensitivity of -25.7 dBm were obtained under a 1.25-Gb/s Tx-Rx operation for digital applications. For an analog Rx application, a module responsivity of about 0.8 A/W was achieved, and a second-order intermodulation distortion value of less than -70 dBc at an optical modulation index of 40% was obtained under a two-tone test of 400 and 450 MHz
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