Article

Full silicidation process for making CoSi2 on SiO2

DOI:10.1063/1.1728299
Source: OAI

ABSTRACT This version is available at the following Publisher URL: http://apl.aip.org

0 0
 · 
0 Bookmarks
 · 
11 Views
Data provided are for informational purposes only. Although carefully collected, accuracy cannot be guaranteed. The impact factor represents a rough estimation of the journal's impact factor and does not reflect the actual current impact factor. Publisher conditions are provided by RoMEO. Differing provisions from the publisher's actual policy or licence agreement may be applicable.

Keywords

following Publisher URL