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Contactless magnetically levitated silicon wafer transport system

Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology, 373-1, Kusong-dong, Yusong-gu, Taejon 305-701, Korea
Mechatronics (Impact Factor: 1.82). 08/1996; 6(5). DOI: 10.1016/0957-4158(95)00083-6

ABSTRACT A new magnetically levitated wafer transport system is developed for the semiconductor fabrication process to get rid of the particle and oil contaminations that normally exist in conventional transport systems. The transport system consists of levitation, stabilization tracks, and a propelling system. Stabilities needed for levitation in the transport system are achieved by an antagonistic property produced in the tracks and using a simple feedback control. The continuous propelling force is obtained by sending specific current patterns to the propulsion coils. The dynamic model of the transport system is presented and analyzed.

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    • "In the electromagnetic levitation, the levitation force comes from a magnetic field generated by permanent, electro -or superconducting magnets. The electromagnetic levitation was employed for studying crystallization processes and silicon wafer transport systems (see Davis, 1997; Park et al. 1996; Motokawa et al. 1998; Kang et al. 2003 and papers cited therein). However, the use of such levitation scheme is limited to materials with high electrical conductivity. "
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