Ultradense and planarized antireflective vertical silicon nanowire array using a bottom-up technique

SiNaPS Laboratory SP2M, UMR-E CEA/UJF-Grenoble 1, CEA/INAC, 17 Avenue des Martyrs, Grenoble 38054, France. .
Nanoscale Research Letters (Impact Factor: 2.78). 03/2013; 8(1):123. DOI: 10.1186/1556-276X-8-123
Source: PubMed


The production and characterization of ultradense, planarized, and organized silicon nanowire arrays with good crystalline and optical properties are reported. First, alumina templates are used to grow silicon nanowires whose height, diameter, and density are easily controlled by adjusting the structural parameters of the template. Then, post-processing using standard microelectronic techniques enables the production of high-density silicon nanowire matrices featuring a remarkably flat overall surface. Different geometries are then possible for various applications. Structural analysis using synchrotron X-ray diffraction reveals the good crystallinity of the nanowires and their long-range periodicity resulting from their high-density organization. Transmission electron microscopy also shows that the nanowires can grow on nonpreferential substrate, enabling the use of this technique with universal substrates. The good geometry control of the array also results in a strong optical absorption which is interesting for their use in nanowire-based optical sensors or similar devices.

Download full-text


Available from: Pascal Gentile,
1 Follower
21 Reads
  • Source
    • "It leads to small differences in the wires’ height, as shown in Figure 4d. In order to remove the parasite wires and obtain a perfectly homogeneous array, all wires are grown out of the alumina layer, and a method using ultrasound and plasma is used to selectively etch the wires above the alumina matrix [40]. "
    [Show abstract] [Hide abstract]
    ABSTRACT: In this work, nanoimprint lithography combined with standard anodization etching is used to make perfectly organised triangular arrays of vertical cylindrical alumina nanopores onto standard <100>-oriented silicon wafers. Both the pore diameter and the period of alumina porous array are well controlled and can be tuned: the periods vary from 80 to 460 nm, and the diameters vary from 15 nm to any required diameter. These porous thin layers are then successfully used as templates for the guided epitaxial growth of organised mono-crystalline silicon nanowire arrays in a chemical vapour deposition chamber. We report the densities of silicon nanowires up to 9 x 109 cm-2 organised in highly regular arrays with excellent diameter distribution. All process steps are demonstrated on surfaces up to 2 x 2 cm2. Specific emphasis was made to select techniques compatible with microelectronic fabrication standards, adaptable to large surface samples and with a reasonable cost. Achievements made in the quality of the porous alumina array, therefore on the silicon nanowire array, widen the number of potential applications for this technology, such as optical detectors or biological sensors.
    Nanoscale Research Letters 06/2013; 8(1):287. DOI:10.1186/1556-276X-8-287 · 2.78 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: The use of nanoporous anodic alumina as a template for silicon nanowire growth enables the production of ultra dense nanowire arrays with density up to 8.109 cm−2. The integration of such nanowire arrays in micro-supercapacitor electrodes significantly improves the electrode capacitance per planar surface area and nanowires length unit compared to electrodes made from silicon nanowires grown from gold colloids (from 5.2 μ−2.μm to 36.7 μ−2.μm). Micro-supercapacitors with such electrodes and ionic liquid as electrolyte have a very promising cycling stability featuring less than 1% of losses after 300 000 cycles.
    Electrochimica Acta 01/2014; 117:159–163. DOI:10.1016/j.electacta.2013.11.097 · 4.50 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: Continuous conductive gold nanofibers are prepared via the "tubes by fiber templates" process. First, poly(l-lactide) (PLLA)-stabilized gold nanoparticles (AuNP) with over 60 wt% gold are synthesized and characterized, including gel permeation chromatography coupled with a diode array detector. Subsequent electrospinning of these AuNP with template PLLA results in composite nanofibers featuring a high gold content of 57 wt%. Highly homogeneous gold nanowires are obtained after chemical vapor deposition of 345 nm of poly(p-xylylene) (PPX) onto the composite fibers followed by pyrolysis of the polymers at 1050 °C. The corresponding heat-induced transition from continuous gold-loaded polymer tubes to smooth gold nanofibers is studied by transmission electron microscopy and helium ion microscopy using both secondary electrons and Rutherford backscattered ions. © 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.
    Macromolecular Rapid Communications 12/2014; 36(3). DOI:10.1002/marc.201400485 · 4.94 Impact Factor