Article

Dopants in LiNbO3: Lattice Site Location, Ion Implantation and Epitaxial Regrowth

MRS Proceedings 12/1990; 244. DOI: 10.1557/PROC-244-311

ABSTRACT Ion-beam/channeling data for the lattice location of Ti, Hf, Er and Nd in LiNbO3 and LiNbO3: Mg are presented. These impurities are relevant in relation to waveguide and integrated optics devices. It is shown that co-doping with Mg markedly influences the lattice location observed in LiNbO3. The amorphization and recrystalization process following Hf implantation and annealing are also discussed.

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