NEXAFS study on carbon-based material formed by focused-ion-beam chemical-vapor-deposition

Laboratory of Advanced Science and Technology for Industry (LASTI), University of Hyogo, Kōbe, Hyōgo, Japan
Radiation Physics and Chemistry (Impact Factor: 1.38). 11/2006; 75(11):1850-1854. DOI: 10.1016/j.radphyschem.2005.07.039


The coordination of carbon atoms in the carbon-based material formed by chemical-vapor-deposition of phenanthrene assisted by Ga-focused ion beam was investigated by the measurement of near-edge X-ray absorption fine structure spectra of the carbon K-edge over the excitation energy range 275–320 eV. Novel peak observed at 289.0 eV was assigned to the 1s→σ* transition of carbon neighboring to the residue gallium. The material formed by this method was found to be Ga-doped diamond-like carbon, that consists of a high sp3 hybridized carbon.

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