NEXAFS study on carbon-based material formed by focused-ion-beam chemical-vapor-deposition
ABSTRACT The coordination of carbon atoms in the carbon-based material formed by chemical-vapor-deposition of phenanthrene assisted by Ga-focused ion beam was investigated by the measurement of near-edge X-ray absorption fine structure spectra of the carbon K-edge over the excitation energy range 275–320 eV. Novel peak observed at 289.0 eV was assigned to the 1s→σ* transition of carbon neighboring to the residue gallium. The material formed by this method was found to be Ga-doped diamond-like carbon, that consists of a high sp3 hybridized carbon.
- Japanese Journal of Applied Physics 01/2009; 48. · 1.07 Impact Factor
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ABSTRACT: The effects of annealing on the material characteristics of a diamond-like carbon (DLC) thin film fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD) were investigated. The elementary analysis, using Rutherford backscattering spectrometry and elastic recoil detection analysis, and measurement of hardness and Young's modulus, using a nanoindentation technique, were performed on the FIB-CVD DLC thin film by annealing for 1 h in the temperature range from room temperature to 1273 K. Elementary analysis indicated that the Ga content in the FIB-CVD DLC film used as an ion source began to decrease considerably at 523 K and the H content also began to decrease at 773 K. On the other hand, the hardness and Young's modulus of the FIB-CVD DLC film were found to decrease beyond 773 K. This decrease in hardness is ascribed to the variation in H content rather than in Ga content in the film.Japanese Journal of Applied Physics 01/2008; 47:7464-7466. · 1.07 Impact Factor
- Journal of Vacuum Science & Technology B - J VAC SCI TECHNOL B. 01/2009; 27(6).