Article

MEMS shear stress sensors: promise and progress

Department of Mechanical and Aerospace Engineering; Department of Electrical and Computer Engineering, University of Florida -Gainesville, 32611-6250, Florida; MS170, NASA Langley Research Center Hampton Virginia, 23681
IUTAM Symposium on Flow Control and MEMS 09/2006; DOI: 10.2514/6.2004-2606

ABSTRACT This paper reviews existing microelectromechanical systems (MEMS)-based shear stress sensors. The promise and progress of MEMS scaling advantages to improve the spatial and temporal resolution and accuracy of shear stress measurement is critically reviewed. The advantages and limitations of existing devices are discussed. Finally, unresolved technical issues are summarized for future sensor development.

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