High speed silicon Mach-Zehnder modulator based on interleaved PN junctions

State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, China.
Optics Express (Impact Factor: 3.53). 07/2012; 20(14):15093-9. DOI: 10.1364/OE.20.015093
Source: PubMed

ABSTRACT A high speed silicon Mach-Zehnder modulator is proposed based on interleaved PN junctions. This doping profile enabled both high modulation efficiency of V(π)L(π) = 1.5~2.0 V·cm and low doping-induced loss of ~10 dB/cm by applying a relatively low doping concentration of 2 × 10(17) cm(-3). High speed operation up to 40 Gbit/s with 7.01 dB extinction ratio was experimentally demonstrated with a short phase shifter of only 750 μm.

  • Source
    [Show abstract] [Hide abstract]
    ABSTRACT: We present small-sized depletion-type silicon Mach-Zehnder (MZ) modulator with a vertically dipped PN depletion junction (VDJ) phase shifter based on a CMOS compatible process. The fabricated device with a 100 μm long VDJ phase shifter shows a V<sub>π</sub>L<sub>π</sub> of ∼0.6 V·cm with a 3 dB bandwidth of ∼50 GHz at -2 V bias. The measured extinction ratios are 6 and 5.3 dB for 40 and 50 Gb/s operation under 2.5 V<sub>pp</sub> differential drive, respectively. On-chip insertion loss is 3 dB for the maximum optical transmission. This includes the phase-shifter loss of 1.88 dB/100 μm, resulting mostly from the extra optical propagation loss through the polysilicon-plug structure for electrical contact, which can be readily minimized by utilizing finer-scaled lithography nodes. The experimental result indicates that a compact depletion-type MZ modulator based on the VDJ scheme can be a potential candidate for future chip-level integration.
    Optics Letters 03/2014; 39(8). DOI:10.1364/OL.39.002310 · 3.39 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: A novel method to significantly decrease power consumption in a silicon switch based on an asymmetric Mach-Zehnder interferometer (MZI) structure is proposed and experimentally demonstrated. A radical power consumption reduction up to 50% is achieved for switching digital data at bit rates from 10 to 30Gbps with respect to a conventional switch based on a symmetric MZI. Furthermore, the broadband performance of the proposed silicon MZI comb switch is also demonstrated by transmitting a 120 Gbps DWDM data stream.
    SPIE Photonics Europe; 05/2014
  • [Show abstract] [Hide abstract]
    ABSTRACT: One of the key challenges in Silicon based optical interconnect system remains to be the efficient coupling of optical signals from the submicron size on-chip waveguides to standard single mode (SM) fibers with low insertion loss (IL) and relaxed alignment tolerance. Large optical alignment tolerance allows optical connectors to be attached to on-chip waveguides passively using standard semiconductor pick-and-place assembly tools that have placement accuracies of 10- 15μm. To facilitate the assembly, optical fiber coupling elements need to be modular and compact. They have to also have low profile to avoid blocking air flow or mechanical interference with other elements of the package. In this paper we report the development of a two-dimensional (2D) SM optical fiber coupling architecture that consists of Si based photonic lightwave circuit (PLC) substrate and a high-density micro-lensed fiber optic connector. The system is compact, efficient and has large optical alignment tolerance. At 1300nm an insertion loss of 2.4dB and 1.5dB was measured for the PLC module and the fiber optic connector, respectively. When the PLC module and connector was aligned together, a total insertion loss of 7.8dB was demonstrated with x,y alignment tolerance of 40μm for 1dB optical loss. The SM optical coupling architecture presented here is scalable, alignment tolerant and has the potential to be manufactured in high volume. To our knowledge, such a system has not been reported in the literature so far.
    Proceedings of SPIE - The International Society for Optical Engineering 02/2014; DOI:10.1117/12.2040143 · 0.20 Impact Factor

Full-text (2 Sources)

Available from
Sep 17, 2014