Article

Wrinkle-Based Measurement of Elastic Modulus of Nano-Scale Thin Pt Film Deposited on Polymeric Substrate: Verification and Uncertainty Analysis

Experimental Mechanics (Impact Factor: 1.55). 50(5):635-641. DOI: 10.1007/s11340-009-9243-8

ABSTRACT Wrinkle-based measurement of elastic modulus for a nano-scale thin film was analyzed. As a demonstrative example, the wrinkles
of Pt films on a Polydimethylsiloxane (PDMS) substrate under compressive loading were formed with a well-defined wavelength,
corresponding to the difference of elastic moduli between the films and substrates. The elastic modulus of the Pt nano-scale
thin film measured with the wrinkle-based measurement was found to be consistent with that independently measured with micro-tensile
test. Uncertainty of the wrinkle-based measurement was analyzed to figure out the main uncertainty components for the evaluation
of elastic modulus measurement, and guidelines for the reliable wrinkle-based measurement were suggested.

KeywordsNano-scale thin film-Pt-Wrinkle-Elastic modulus-Tensile test

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