Dielectric, ferroelectric and optical properties of BaZr0.2Ti0.8O3 thin films prepared by sol–gel-hydrothermal process
ABSTRACT BaZr0.2Ti0.8O3 thin films on Pt/Ti/SiO2/Si substrates have been fabricated under low temperature conditions by a sol–gel-hydrothermal technique. The dielectric constant
is 247–83 in the frequency range of 1kHz–1MHz. The corresponding dielectric loss is ~10−2. The capacitance–voltage curve shows strong non-linear dielectric behavior leading to a high tunability, up to ~30% at 1kHz.
The remanent polarization and coercive field at room temperature are measured to be ~1.5μC/cm2 and ~90kV/cm. The infrared optical properties of the thin films are investigated using an infrared spectroscopic ellipsometry
in the wave number range of 800–4,000cm−1. Optical constants of the thin films are simultaneously obtained.
KeywordsThin films-Low temperature technique-Dielectric properties