Conference Paper

CMOS integrated gas sensor chip using SAW technology

Dept. of Electr. & Comput. Eng., George Washington Univ., DC, USA
DOI: 10.1109/ISCAS.2003.1206353 Conference: Circuits and Systems, 2003. ISCAS '03. Proceedings of the 2003 International Symposium on, Volume: 4
Source: IEEE Xplore

ABSTRACT The development of inexpensive and miniaturized SAW gas sensors that are highly selective and sensitive is introduced. These sensors are implemented with micro-electro-mechanical systems (MEMS) in CMOS technology. Since the sensors are fabricated on a silicon substrate, additional signal processing circuitry can easily be integrated into the chip thereby readily providing functions such as multiplexing and analog-to-digital conversion that are needed for integration into a network.

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