CMOS integrated gas sensor chip using SAW technology
ABSTRACT The development of inexpensive and miniaturized SAW gas sensors that are highly selective and sensitive is introduced. These sensors are implemented with micro-electro-mechanical systems (MEMS) in CMOS technology. Since the sensors are fabricated on a silicon substrate, additional signal processing circuitry can easily be integrated into the chip thereby readily providing functions such as multiplexing and analog-to-digital conversion that are needed for integration into a network.
- SourceAvailable from: Mona Zaghloul
Conference Paper: Miniature SAW Device for RF-Wireless Applications Using MEMS TechnologyCircuits and Systems, 2006. MWSCAS '06. 49th IEEE International Midwest Symposium on; 09/2006
- Midwest Symposium on Circuits and Systems 01/2010;
- Microelectronics Journal. 01/2007; 38:426-429.