Article

The CantiClever: a dedicated probe for magnetic force microscopy

MESA Res. Inst., Twente Univ., Enschede
IEEE Transactions on Magnetics (Impact Factor: 1.21). 10/2002; DOI: 10.1109/TMAG.2002.803585
Source: IEEE Xplore

ABSTRACT We present a new cantilever for magnetic-force microscopy (MFM), the CantiClever, which is not derived from atomic-force microscopy (AFM) probes but optimized for MFM. Our design integrates the cantilever and the magnetic tip in a single manufacturing process with the use of silicon micromachining techniques, which allows for batch fabrication of the probes. This manufacturing process enables precise control on all dimensions of the magnetic tip, resulting in a very thin magnetic element with a very high aspect ratio. Using. the CantiClever, magnetic features down to 30 nm could be observed in a CAMST reference sample.

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