Micro Multi-Probes Electrode Array for the Recording Retinal Neuron Signal
ABSTRACT This research is to design micro multi-probe electrode array (MEA) for retinal neuron signal recording system, which would be used for the measurement system on bio-medical applications. Based on the optimal geometry of MEA designed by ANSYS, the novel fabrication process of MEA was accomplished by using MEMS technology based on silicon-on-insulator (SOI) wafer, inherently has good controllable probe thickness. The multi-probes with a 16-sites recording electrode array has been manufactured, which has been past for strength test by force gauge and electrical performance test by using impedance measurement system. Neuron extracellular recording by using fabricated MEA has been shown, which was comparable with the one measured by traditional glass pipettes. MEA for recording retinal neuron signal would be performed for further development.
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ABSTRACT: This paper reports an improved method for reducing the impedance of microelectrode array (MEA). The impedance reduction is generally required by increasing the effective surface area of electrode. We have fabricated and treated the multi-walled carbon nanotubes (MWCNTs) based MEA for neuroscience application. The effect of plasma treatment on the surface wettability of MWCNTs was examined and characterized. The H<sub>2</sub>O plasma treatment was utilized to modify the surface of MWCNTs from superhydrophobic to superhydrophilic. The treated recipe of power under 25 W for 10 sec could improve the electro-chemical and biological properties efficiently.Solid-State Sensors, Actuators and Microsystems Conference, 2009. TRANSDUCERS 2009. International; 07/2009