Conference Paper

Micro Multi-Probes Electrode Array for the Recording Retinal Neuron Signal

Nat. Tsing-Hua Univ., Hsinchu
DOI: 10.1109/SENSOR.2007.4300398 In proceeding of: Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International
Source: IEEE Xplore

ABSTRACT This research is to design micro multi-probe electrode array (MEA) for retinal neuron signal recording system, which would be used for the measurement system on bio-medical applications. Based on the optimal geometry of MEA designed by ANSYS, the novel fabrication process of MEA was accomplished by using MEMS technology based on silicon-on-insulator (SOI) wafer, inherently has good controllable probe thickness. The multi-probes with a 16-sites recording electrode array has been manufactured, which has been past for strength test by force gauge and electrical performance test by using impedance measurement system. Neuron extracellular recording by using fabricated MEA has been shown, which was comparable with the one measured by traditional glass pipettes. MEA for recording retinal neuron signal would be performed for further development.

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