Conference Paper

Development of an active-matrix HEED cold cathode and its application to an image sensor

Corporate R&D Labs., Pioneer Corp., Saitama
DOI: 10.1109/DEIV.2006.357435 Conference: Discharges and Electrical Insulation in Vacuum, 2006. ISDEIV '06. International Symposium on, Volume: 2
Source: IEEE Xplore


For practical advantages of the HEED (high-efficiency electron emission device) such as a low driving voltage, a high emission current density, especially application to an ultra high sensitive compact image sensor can be expected. A prototype active-matrix HEED image sensor integrated with scanning driver circuits was developed with a HARP (high-gain avalanche rushing amorphous photoconductor) target. It was demonstrated that the prototype 256 times 192 pixels active-matrix HEED array operates well as an effective probe for high-resolution image pickup under dim lighting. The possibility of the active-matrix HEED for development of next-generation image sensor with ultra high sensitivity and high definition was concluded in this report

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