Nanometer-scale resolution microscopy with compact extreme ultraviolet lasers
University of California, Berkeley, Berkeley, California, United StatesDOI: 10.1109/LEOS.2006.279114 Conference: Lasers and Electro-Optics Society, 2006. LEOS 2006. 19th Annual Meeting of the IEEE
Source: IEEE Xplore
In this paper, we have demonstrated nanoscale resolution microscopy in transmission and reflection modes using the lambda=46.9 nm and lambda=13 nm wavelength output from table-top EUV lasers. This compact microscope acquires high quality images in transmission and reflection modes in tens of seconds. Its spatial resolution has been determined to be 120-150 nm
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