Conference Proceeding

High Q tunable cavity using dielectric less RF-MEMS varactors

CNRS, Univ. de Limoges, Limoges, France
11/2009; In proceeding of: Microwave Conference, 2009. EuMC 2009. European
Source: IEEE Xplore

ABSTRACT This paper presents first experimental results on high Q MEMS tunable microwave cavity using RF-MEMS switched varactors. MEMS varactors that have been used in this work are based on a dielectric less tunable cantilever actuator, with good reliability and well-established fabrication process. It is shown that one can obtain large Q using type of component, with measured Qu between 550 and 850 for a tuning range of 500 MHz around 5 GHz.

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