Article

Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition

Himeji Institute of Technology, Graduate School of Science, LASTI, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, JapanCREST JST, Japan Science and Technology Co., Kawaguchi Center Building, 4-1-8, Hon-cho, Kawaguchi, Saitama 332-0012, Japan
Journal of vacuum science & technology. B, Microelectronics and nanometer structures: processing, measurement, and phenomena: an official journal of the American Vacuum Society (impact factor: 1.34). 12/2003; DOI:10.1116/1.1630329 pp.2737 - 2741
Source: IEEE Xplore

ABSTRACT Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming three-dimensional nanostructures. Various diamond-like-carbon (DLC) free-space-wirings have been demonstrated by FIB-CVD using a computer-controlled pattern generator, which is a commercially available pattern generator for electron-beam (EB) lithography. The material composition and crystal structure of DLC free-space-wiring were studied by transmission-electron microscopy and energy-dispersive x-ray spectroscopy. As a result, it became clear that DLC free-space-wiring is amorphous carbon containing a Ga core in the wire. Furthermore, the electrical resistivity measurement of DLC free-space-wiring was carried out by two terminal electrodes. Au electrodes were fabricated by EB lithography and a lift-off process. The electrical resistivity was about 100 Ω cm at room temperature. © 2003 American Vacuum Society.

0 0
 · 
0 Bookmarks
 · 
38 Views
  • Source
    Article: Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications
    Shinji MATSUI, Reo KOMETANI
    [show abstract] [hide abstract]
    ABSTRACT: Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C 14 H 10 ) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 μm external diameter and 12 μm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 μm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.
  • Source
    Article: Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics
    Kenichiro NAKAMATSU, Masao NAGASE, Toshinari ICHIHASHI, Kazuhiro Kanda, Yuichi HARUYAMA, Takashi KAITO, Shinji Matsui
    [show abstract] [hide abstract]
    ABSTRACT: Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000°C in vacuum. The stiffness was decreased to approximately half of the stiffness of the nanospring without annealing.
    IEICE Transactions on Electronics 01/2007; E90-C(1):41-45. · 0.40 Impact Factor
Data provided are for informational purposes only. Although carefully collected, accuracy cannot be guaranteed. The impact factor represents a rough estimation of the journal's impact factor and does not reflect the actual current impact factor. Publisher conditions are provided by RoMEO. Differing provisions from the publisher's actual policy or licence agreement may be applicable.

Keywords

Au electrodes
 
commercially available pattern generator
 
DLC
 
DLC free-space-wiring
 
excellent technology
 
Focused-ion-beam chemical vapor deposition
 
material composition
 
room temperature
 
three-dimensional nanostructures
 
transmission-electron microscopy
 
Various diamond-like-carbon
 
© 2003 American Vacuum Society
 

Takahiko Morita