Free-space-wiring fabrication in nano-space by focused-ion-beam chemical vapor deposition
ABSTRACT Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming three-dimensional nanostructures. Various diamond-like-carbon (DLC) free-space-wirings have been demonstrated by FIB-CVD using a computer-controlled pattern generator, which is a commercially available pattern generator for electron-beam (EB) lithography. The material composition and crystal structure of DLC free-space-wiring were studied by transmission-electron microscopy and energy-dispersive x-ray spectroscopy. As a result, it became clear that DLC free-space-wiring is amorphous carbon containing a Ga core in the wire. Furthermore, the electrical resistivity measurement of DLC free-space-wiring was carried out by two terminal electrodes. Au electrodes were fabricated by EB lithography and a lift-off process. The electrical resistivity was about 100 Ω cm at room temperature. © 2003 American Vacuum Society.
Article: Three-Dimensional Nanostructure Fabrication by Focused-Ion-Beam Chemical Vapor Deposition and Its Applications[show abstract] [hide abstract]
ABSTRACT: Three-dimensional nanostructure fabrication has been demonstrated by 30 keV Ga+ focused-ion-beam chemical-vapor-deposition (FIB-CVD) using a phenanthrene (C 14 H 10 ) source as a precursor. Microstructure plastic arts is advocated as a new field using micro-beam technology, presenting one example of micro-wine-glass with 2.75 μm external diameter and 12 μm height. The deposition film is a diamondlike amorphous carbon. A large Young's modulus that exceeds 600 GPa seems to present great possibilities for various applications. Producing of three-dimensional nanostructure is discussed. Micro-coil, nanoelectrostatic actuator, and nano-space-wiring with 0.1 μm dimension are demonstrated as parts of nanomechanical system. Furthermore, nanoinjector and nanomanipulator are also fabricated as a novel nano-tool for manipulation and analysis of subcellular organelles.
Article: Fabrication of Diamond-Like Carbon Nanosprings by Focused-Ion-Beam Chemical Vapor Deposition and Evaluation of Their Mechanical Characteristics[show abstract] [hide abstract]
ABSTRACT: Our investigation of diamond-like carbon (DLC) nano-springs with a 130 nm spring-section diameter, which were fabricated by focused-ion-beam chemical vapor deposition (FIB-CVD), showed for the first time that nanosprings can be stretched. We observed large displacements of the FIB-CVD nanosprings using in situ optical microscopy; in other words, the nanosprings showed behavior similar to that of macroscale springs. In addition, we investigated the dependence of the spring constant of DLC nanosprings on spring diameter. The spring constants, measured using commercially available cantilevers, ranged from 0.47 to 0.07 N/m. The diameter dependence of spring constant can be accurately expressed by the conventional formula for a coil spring. The estimated shear modulus of the DLC nano-springs was about 70 GPa. This value is very close to the value of conventional coil springs made of steel. Furthermore, we measured the stiffness of a DLC nanospring annealed at 1000°C in vacuum. The stiffness was decreased to approximately half of the stiffness of the nanospring without annealing.IEICE Transactions on Electronics 01/2007; E90-C(1):41-45. · 0.40 Impact Factor