Article

Dielectric characteristics of barium strontium titanate films prepared by aerosol deposition on a Cu substrate

Nat. Inst. of Adv. Ind. Sci. & Technol. (AIST), Tsukuba
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control (impact factor: 1.69). 04/2009; DOI:10.1109/TUFFC.2009.1059
Source: IEEE Xplore

ABSTRACT Polycrystalline barium strontium titanate (BaxSr1-xTiO3, BST) films were directly prepared on copper substrates using an aerosol deposition method (ADM) at room temperature. Electric properties, such as the dielectric constant and tunability, were investigated as a function of the Ba content in BaxSr1-xTiO3 (x = 1.0, 0.6, 0.4) films. At a frequency of 100 kHz, the dielectric constant of the as-deposited BST films were 100, 201, and 72 for x = 1.0, 0.6, and 0.4, respectively. After annealing in N2 at 500degC, the dielectric constant of the films on Cu electrodes were 190, 400, and 170 at x = 1.0, 0.6, and 0.4, respectively. Moreover, the BST (x = 0.6) film showed a high tunability of 30% under an applied electric field of 300 kV cm-1.

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Keywords

aerosol deposition method
 
applied electric field
 
as-deposited BST films
 
Ba content
 
BST
 
copper substrates
 
dielectric constant
 
Electric properties
 
Polycrystalline barium strontium titanate
 
room temperature
 
tunability
 

Sewoong Oh