Conference Proceeding

Pressure sensor based on surface acoustic wave resonators

11/2008; DOI:10.1109/ICSENS.2008.4716617 pp.1024 - 1027 In proceeding of: Sensors, 2008 IEEE
Source: IEEE Xplore

ABSTRACT In this work we present a pressure sensor based on surface acoustic waves (SAWs) resonators and operating in the pressure range from 0 bar to 3 bar. The achieved high resolution values (3.5 Pa), are obtained making use of 2-ports SAW resonators working at approximately 393 MHz on a quartz membrane. The membrane deformations under the hydrostatic pressure, have been studied by finite element methods (FEM), using the elastic constants of the anisotropic ST-cut quartz and considering vacuum as reference pressure on the other side of the membrane. The implemented sensor is an hybrid structure where the quartz membrane is placed between two glass ceramic elements; the first to implement an hermetically closed cavity, the other to define the diaphragm. A differential configuration has been designed to reduce parasitic phenomena due to temperature variations. The response curve of the sensor is reported.

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Keywords

2-ports SAW resonators
 
anisotropic ST-cut quartz
 
diaphragm
 
differential configuration
 
elastic constants
 
finite element methods
 
glass ceramic elements
 
hydrostatic pressure
 
Pa
 
parasitic phenomena
 
quartz membrane
 
reference pressure
 
resolution values
 
SAWs
 
temperature variations
 

M. Benetti