Conference Paper

11E-4 Application of a Vibrating Membrane Model to Bulk-Acoustic-Wave Resonators

NXP Semicond. Res. Eindhoven, Eindhoven
DOI: 10.1109/ULTSYM.2007.264 Conference: Ultrasonics Symposium, 2007. IEEE
Source: IEEE Xplore


For a three-dimensional description of rectangular BAW resonators, a simple vibrating membrane model is revisited. Displacement profiles from this model are compared to measured profiles. Furthermore, a method for extraction of dispersion characteristics from electrical measurements is proposed and verified against interferometry measurements.

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