Conference Paper

A compact closed-loop nanomanipulation system in scanning electron microscope

Adv. Micro & Nanosyst. Lab., Univ. of Toronto, Toronto, ON, Canada
DOI: 10.1109/ICRA.2011.5980493 Conference: Robotics and Automation (ICRA), 2011 IEEE International Conference on
Source: IEEE Xplore


This paper presents a nanomanipulation system for operation inside scanning electron microscopes (SEM). The system is small in size, capable of being mounted onto and demounted from an SEM through the specimen exchange chamber without breaking the high vacuum of the SEM. This advance eliminates frequent opening of the high-vacuum chamber, thus, incurs less contamination to the SEM, avoids lengthy pumping, and significantly eases the exchange of end-effectors (e.g., nano probes and grippers). The system consists of two independent 3-DOF Cartesian nanomanipulators based on piezo motors and piezo actuators. High-resolution optical encoders are integrated into the nanomanipulators to provide position feedback for closed-loop control. A look-then-move control system and a contact detection algorithm are implemented for horizontal and vertical nanopositioning. The system design, system characterization details, and system performance are described.

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    ABSTRACT: A novel dextrous stick coordination manipulation (DeSCom) system with dual-nanomanipulator was proposed for the assembly of three-dimensional (3D) structures. The coordination control between two dextrous sticks was realized based on the vision feedback and the manipulation resolution was around 30 nm. It was set up with hybrid motors to ensure the large operation range and operation precision. The dextrous stick was fabricated with glass pipette and the 2-dimensional (2D) unit was fabricated by UV illumination of the hydrogen named Poly (ethylene glycol) Diacrylate (PEGDA). The immobilization and assembly of 2D unit was achieved through the interaction of two sticks. The DeSCom system could realize the arbitrary 3D structure with the change of 2D unit shape through the different patterning with UV illumination. At last, the bottom-up integration of the 3D structure was performed based on the utilization of DeSCom strategies with image processing information. The preliminary assembly experiment was achieved.
    2013 IEEE 13th International Conference on Nanotechnology (IEEE-NANO); 08/2013