Conference Paper
Transformation of surface acoustic waves into boundary waves in Piezoelectric/Metal/Dielectric structures
DOI: 10.1109/ULTSYM.2009.5441706 Conference: Ultrasonics Symposium (IUS), 2009 IEEE International
Source: IEEE Xplore

Conference Paper: Insight into the wave transformation mechanisms via numerical simulation of acoustic fields in Piezoelectric/Metal grating/Dielectric structures
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ABSTRACT: The mechanism of SAW transformation with variation of film thickness is investigated in Piezoelectric/Metal grating/Dielectric structures via simulation of acoustic fields. By way of example, YX and 128°YX cuts of lithium niobate are considered as substrates, with Cu grating and isotropic SiO2 as overlay. The motions, which accompany the wave propagation in the sagittal plane, are visualized, and the added contour plots show variation of shearhorizontal displacements. The transformation of the wave nature with SiO2 thickness increasing from zero to few periods is observed for each wave propagating in the analyzed material structures. Examples of wave transformation into boundary waves and into normal modes propagating in SiO2 film are demonstrated. The difference in the behavior of SAW modes in the grating is correlated with velocity versus film thickness dependences.Ultrasonics Symposium (IUS), 2010 IEEE; 01/2010 
Conference Paper: Insight into the Wave Transformation Mechanisms via Numerical Simulation of Acoustic Fields in Piezoelectric/Metal Grating/Dielectric Structures
IEEE Ultrasonics Symposium; 01/2010  [Show abstract] [Hide abstract]
ABSTRACT: A numerical technique, which combines FEM analysis of electrode area with matrix formalism applied to spectral domain analysis (SDA) of eigen modes in multilayered substrate and multilayered dielectric upper halfspace, is described as an efficient tool of investigating the wave characteristics in periodic metal grating sandwiched between two multilayered halfspaces, with arbitrary thickness of each layer. The universal character of the developed technique is illustrated by few examples of its application to different types of structure providing propagation of common SAW, boundary waves at interface, plate modes, normal modes in a thin film deposited over the grating etc. The transformation between the waves with continuously increasing film thicknesses can be observed.Ultrasonics Symposium (IUS), 2010 IEEE; 01/2010
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