Self Heated Thermo-Resistive Element Hot Wire Anemometer

Sch. of Eng., Griffith Univ., Gold Coast, QLD, Australia
IEEE Sensors Journal (Impact Factor: 1.85). 05/2010; DOI: 10.1109/JSEN.2009.2035518
Source: IEEE Xplore

ABSTRACT A microelectromechanical systems (MEMS) hot wire anemometer consisting of thermoresistive elements arranged in a differential bridge configuration is presented. The excitation of the elements to the point of self heating allows for dedicated heating elements to be omitted from the device without compromising operation or accuracy. Overall power consumption gives air velocity, and the temperature differential of each element pair is used for wind direction calculation and has demonstrated a sensing resolution better than 1% and a repeatability better than 2%.

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    ABSTRACT: In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.
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