Self Heated Thermo-Resistive Element Hot Wire Anemometer

Sch. of Eng., Griffith Univ., Gold Coast, QLD, Australia
IEEE Sensors Journal (Impact Factor: 1.85). 05/2010; DOI: 10.1109/JSEN.2009.2035518
Source: IEEE Xplore

ABSTRACT A microelectromechanical systems (MEMS) hot wire anemometer consisting of thermoresistive elements arranged in a differential bridge configuration is presented. The excitation of the elements to the point of self heating allows for dedicated heating elements to be omitted from the device without compromising operation or accuracy. Overall power consumption gives air velocity, and the temperature differential of each element pair is used for wind direction calculation and has demonstrated a sensing resolution better than 1% and a repeatability better than 2%.

  • [Show abstract] [Hide abstract]
    ABSTRACT: In this paper, we propose a sensor for measuring the three-dimensional (3D) velocity vector of airflows. The sensor, which was a 10 mm spherical figure, had a laminated structure with three channels fabricated inside. The components of the airflow velocity vector were measured respectively by three piezo-resistive cantilevers fabricated in each of the three channels. Experiments with a wind tunnel demonstrated that our sensor can measure not only the velocity amplitude but the 3D velocity direction as well.
    Micro Electro Mechanical Systems (MEMS), 2011 IEEE 24th International Conference on; 02/2011
  • [Show abstract] [Hide abstract]
    ABSTRACT: We demonstrated low flow velocity measurement with a miniaturized corona flow sensor operating in drift mobility increment (DMI) mode. The corona flow sensor consisted of a corona flow probe residing in a small diameter flow tube. The corona flow probe had an electrode gap of ∼700 μm and was constructed with 50 μm stainless wire for cathode and nickel plated steel for anode. As evident in both the analytical and experimental corona current versus applied voltage curves, the corona current varied with the ozone concentration in the drift region. This also allowed the corona current to be responsive to air flow. The experimental corona current versus flow velocity trend was shown to be in agreement with the analytical trend. At an applied voltage of 1800 V, the corona flow sensor was able to measure flow velocities from 4.7 to 94.3 mm/s with a resolution of ∼5 mm/s. Three configurations consisting of the corona flow probe in different orientation with respect to the flow direction were investigated. We also showed that the sensitivity and operating range could potentially be tuned by adjusting the applied voltage. Finally, the significance and limitations of the results were also discussed.
    Sensors and Actuators A Physical 04/2015; 224. DOI:10.1016/j.sna.2015.01.022 · 1.94 Impact Factor
  • Source
    [Show abstract] [Hide abstract]
    ABSTRACT: This paper presents an overview and development of 2-D micromachined thermal wind sensors. It first compares different types of wind sensors, then gives a brief introduction to three basic measurement principles of the thermal wind sensors: hot-wire or hot-film, calorimetric, and time of flight. In order to have a good understanding of development of the 2-D micromachined thermal wind sensors, they are first categorized into thermoresistive, thermoelectric, and thermoelectronic wind sensors based on their operations. Then, each category is further divided into different subcategories, according to their measuring principles and sensor configurations. In Section IV, different materials, fabrication processes, packaging techniques, and control modes of the 2-D micromachined thermal wind sensors are analyzed. This paper also evaluates the core technologies on how to improve the sensitivity, measurement range, and power consumption of the thermal wind sensors.
    06/2014; 1(3):216-232. DOI:10.1109/JIOT.2014.2319296

Full-text (3 Sources)

Available from
May 19, 2014