Conference Paper

Processing and properties of ytterbium-erbium silicate thin film gain media

Microphotonics Center, Massachusetts Inst. of Technol., Cambridge, MA, USA
DOI: 10.1109/GROUP4.2009.5338289 Conference: Group IV Photonics, 2009. GFP '09. 6th IEEE International Conference on
Source: IEEE Xplore

ABSTRACT The structural and photoluminescence properties of ytterbium-erbium silicate thin films have been investigated. The films were fabricated by RF-magnetron co-sputtering of Er2O3, Yb2O3 and SiO2 on c-Si and subsequent annealing in N2 or O2 atmosphere.

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