Conference Paper

High performance spiral inductors embedded on organic substrates for SOP applications

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA
DOI: 10.1109/MWSYM.2002.1012316 Conference: Microwave Symposium Digest, 2002 IEEE MTT-S International, Volume: 3
Source: IEEE Xplore

ABSTRACT This paper presents the design, measured data, and systematic
analysis of spiral embedded inductors fabricated on standard organic
substrates using low-cost, large-area MCM-L technology. Several
configurations for inductors were investigated to optimize the inductor
layout dimensions such as conductor width, number of turns, inner
diameter, spacing between inductor and ground, and inductor area. A
maximum Q of 100 was measured for a 3.6 nH inductor at 1.8 GHz on an
organic substrate with a self resonance frequency of 10.6 GHz within an
inductor core area of 0.72 mm2. The effects of
configurational variables on inductor characteristics such as quality
factor, self-resonance frequency, and inductance are discussed. High-Q
inductors embedded on organic substrates can find numerous RF and
microwave system-on-package (SOP) applications, such as VCOs, IF/RF
bandpass filters, LNAs, etc., in which IC chips are flip-chip mounted on
the package substrate

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