Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography

School of Materials Science and Engineering, Northwestern Polytechnical University, Xi’an, 710072, PR China
Microelectronic Engineering (Impact Factor: 1.34). 04/2009; DOI: 10.1016/j.mee.2008.12.093

ABSTRACT We report on results of fabrication and optical characterisation of sub-250 nm periodic gold nanohole arrays on glass by using UV nanoimprint lithography (UV-NIL) combined with both reactive ion etching (RIE) and Cr/Au lift-off processes. The transmission spectra of the fabricated nanohole gratings were measured for different hole diameters and periods. We also show preliminary results of chemical sensing after surface modification of the gold hole arrays. In agreement with the theoretical prediction, we found that any change in the dielectric index of the surrounding environment of the metallic array produces a transmission peak red shift.

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