Gold nanohole arrays for biochemical sensing fabricated by soft UV nanoimprint lithography
ABSTRACT We report on results of fabrication and optical characterisation of sub-250 nm periodic gold nanohole arrays on glass by using UV nanoimprint lithography (UV-NIL) combined with both reactive ion etching (RIE) and Cr/Au lift-off processes. The transmission spectra of the fabricated nanohole gratings were measured for different hole diameters and periods. We also show preliminary results of chemical sensing after surface modification of the gold hole arrays. In agreement with the theoretical prediction, we found that any change in the dielectric index of the surrounding environment of the metallic array produces a transmission peak red shift.
[Show abstract] [Hide abstract]
ABSTRACT: The patterning of large surface areas with nano structures by using chemical batch processes to avoid using high-energy intensive nano machining processes was investigated. The capability of different surface treatment methods of creating micro and nano structured adaptable mould inserts for subsequent polymer replication by injection moulding was analyzed. New tooling solutions to produce nano structured mould surfaces were investigated. Experiments based on three different chemical-based-batch techniques to establish surface nano (i.e. sub-mu m) structures on large areas were performed. Three approaches were selected: (1) using empty set500 nm nano beads deposition for direct patterning of a 4" silicon wafer; (2) using empty set500 nm nano beads deposition as mask for 4" silicon wafer etching and subsequent nickel electroplating; (3) using the anodizing process to produce empty set500 nm structures on a 30x80 mm(2) aluminium substrate, subsequent nickel electroplating and finally injection moulding.8th International Conference on Multi-Material Micro Manufacture; 01/2011
[Show abstract] [Hide abstract]
ABSTRACT: Microcontact printing (μCP) is a widely used technique for depositing proteins in micro patterns. The investigation of protein-protein interactions in small cells like T-cells (5-10μm), however, require feature sizes in the nanometer range which could be created by nanocontact printing (nCP). The main intention of our work was to develop functionalized Polyhedral Oligomeric Silsesquioxane (POSS) materials as an alternative for poly(dimethylsiloxane) (PDMS) which are commonly used as stamp material for micro-contact printing. POSS materials combine many desirable properties of conventional organic and inorganic components and provide an exemplary core system for developing versatile functional resist materials. Their properties are easily tunable by molecular design to suit the desired application. Used as stamp material POSS combines the advantages of hard stamps for high resolution printing and the possibility to tune the surface chemistry to enable a proper transfer of proteins.In this work, epoxy as well as carboxylic acid functionalized POSS were synthesized and epoxy-carboxylic acid bi-functionalized POSS materials have been developed for nCP stamp applications. The POSS polymers were designed by incorporating the necessary functional groups onto the silsesquioxane cage via platinum catalyzed hydrosilylation chemistry. The presence of epoxy groups allows the resists to polymerize at room temperature under UV-light exposure, while carboxylic acid groups ensure the presence of anionic species (COO-) at the surface of the stamps to facilitate protein transfer. The as-synthesized materials were characterized and supposed structures of the cured materials were confirmed by spectroscopic methods. Via nCP a monolayer of nanoscale avidin patterns have been deposited on epoxy-functionalized glass substrates.European Polymer Journal 11/2014; 65:221-231. DOI:10.1016/j.eurpolymj.2014.11.015 · 3.24 Impact Factor
Manufacturing Nanostructures, One Central Press edited by Prof. Waqar Ahmed, Prof. Nasar Ali, 11/2014: chapter 9: pages 244-262; One Central Press., ISBN: 9781910086070