Fabrication and testing of a SU-8 thermal flow sensor

Ikerlan S. Coop. (CIC microGUNE), Paseo J.M. Arizmendiarrieta 2, 20500 Mondragón (Guipuzcoa), Spain
Sensors and Actuators B Chemical (Impact Factor: 3.84). 06/2010; 147(2):411-417. DOI: 10.1016/j.snb.2010.03.054

ABSTRACT In this work, a microthermal flow sensor integrated in a completely polymeric based microfluidic chip is presented. The fabrication process is based on photolithography of SU-8 layers to pattern the fluidic channels, surface treatment processes in order to improve adhesion of metal layer on top of the polymer, and the use of an adhesive bonding of two patterned SU-8 layers, allowing an easy packaging and integration with other SU-8 based devices like micropumps, microvalves, etc. Characterization of the device shows its successful performance detecting flows in the order of tens of μl/min, working at heater temperatures from 60 °C down to 40 °C. Moreover, the sensor exhibits a linear response at flows below 25 μl/min and the detection of volumes in the range of nanoliters. Such characteristics of the sensor are of great interest for its use in biological applications.

  • Source
    [Show abstract] [Hide abstract]
    ABSTRACT: Here, we describe new fabrication methods aimed to integrate planar tetrode-like electrodes into a polymer SU-8 based microprobe for neuronal recording applications. New concepts on the fabrication sequences are introduced in order to eliminate the typical electrode-tissue gap associated to the passivation layer. Optimization of the photolithography technique and high step coverage of the sputtering process have been critical steps in this new fabrication process. Impedance characterization confirmed the viability of the electrodes for reliable neuronal recordings with values comparable to commercial probes. Furthermore, a homogeneous sensing behavior was obtained in all the electrodes of each probe. Finally, in vivo action potential and local field potential recordings were successfully obtained from the rat dorsal hippocampus. Peak-to-peak amplitude of action potentials ranged from noise level to up to 400-500 μV. Moreover, action potentials of different amplitudes and shapes were recorded from all the four recording sites, suggesting improved capability of the tetrode to distinguish from different neuronal sources.
    Biosensors & Bioelectronics 04/2012; 37(1):1-5. · 6.45 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: This paper presents a SU8 unidirectional diaphragm micropump with embedded out-of-plane cantilever check valves. The device represents a reliable and low-cost solution for integration of microfluidic control in lab-on-a-chip devices. Its planar architecture allows monolithic definition of its components in a single step and potential integration with previously reported PCR, electrophoresis and flow-sensing SU8 microdevices. Pneumatic actuation is applied on a PDMS diaphragm, which is bonded to the SU8 body at wafer level, further enhancing its integration and mass production capabilities. The cantilever check valves move synchronously with the diaphragm, feature fast response (10ms), low dead volume (86nl) and a 94% flow blockage up to 300kPa. The micropump achieves a maximum flow rate of 177 μl min(-1) at 6 Hz and 200 kPa with an effective area of 10 mm(2). The device is reliable, self-priming and tolerant to particles and big bubbles. To the knowledge of the authors, this is the first micropump in SU8 with monolithically integrated cantilever check valves.
    Lab on a Chip 08/2011; 11(19):3320-5. · 5.70 Impact Factor
  • [Show abstract] [Hide abstract]
    ABSTRACT: Studies concerning the functional status of the corneal epithelium are of special interest due to its key role in preventing ocular surface disease and corneal infections. In particular, quantitative measurements of the epithelium permeability translayer electrical resistance (TER) have been proven as a sensitive in vitro test for evaluation of the corneal barrier function. In a recent work from the authors (Guimera et al. Biosens. Bioelectron. 31:55-61, 2012), a novel method to non-invasively assess the corneal epithelial permeability by using tetrapolar impedance measurements, based on the same TER theoretical principles, was presented and validated using a rigid sensing device. In this work, the usability of this method has been dramatically improved by using SU-8 photoresist as a substrate material. The flexibility of this novel sensing device makes no need to apply pressure on the cornea to ensure the electrical contact between the electrodes and the corneal surface. The feasibility of this flexible sensor has been evaluated in vivo by increasing the permeability of rabbit corneal epithelium. For that, different concentrations of benzalkonium chloride (BAC) solution were instilled on different rabbit corneas. The obtained results have been compared with measurements of the permeability to sodium fluorescein of different excised corneas, a well-known method used to evaluate the corneal barrier function, to demonstrate the feasibility of this novel flexible sensor for quantifying the corneal epithelium permeability in vivo in a non-invasive way.
    Biomedical Microdevices 05/2013; · 2.72 Impact Factor