Conference Paper

# Efficient mixed-domain analysis of electrostatic MEMS.

Dept. of Mech. & Ind. Eng., Univ. of Illinois, Urbana-Champaign, IL, USA

DOI: 10.1109/TCAD.2003.816210 Conference: Proceedings of the 2002 IEEE/ACM International Conference on Computer-aided Design, 2002, San Jose, California, USA, November 10-14, 2002 Source: DBLP

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**ABSTRACT:**The subject of this paper is a fully Lagrangian approach for coupled (mechanical deformations caused by applied electric fields) analysis of Micro-Electro-Mechanical (MEM) plates. The analysis is carried out by employing the two-dimensional (2-D) Finite Element Method (FEM) to analyze mechanical deformations in the plate and the three-dimensional (3-D) Boundary Element Method (BEM) to obtain the electric field (and then tractions on the plate surface) in the region exterior to the plate. Self-consistent solutions to the coupled problem are obtained by the relaxation method. Such simulations, especially their dynamic version, has many potential applications such as to understand and design synthetic microjets.Computers & Structures - COMPUT STRUCT. 01/2005; 83(10):758-768. - [Show abstract] [Hide abstract]

**ABSTRACT:**In this paper, the influence of centrifugal forces on the stability of an electro-statically actuated clamped-clamped micro-beam has been investigated. The non-dimensional governing static and dynamic equations have been linearized using based step by step linearization method (SSLM), then, a Galerkin- based reduced order model has been used to solve the linearized equations. For constant value of a bias DC voltage and different values of angular velocity the equilibrium points of the corresponding autonomous system including stable center points, unstable saddle points and singular points have been obtained using the equivalent mass-spring model. Subsequently the bifurcation diagram has been depicted using the obtained fixed point. The static pull-in voltage value for different values of angular velocity and the static pull-in angular velocity for different values of bias voltage have been calculated. The obtained results are validated using results of previous studies and a good agreement has been observed. The effect of the centrifugal force on the fixed points has been studied using the phase portraits of the system for different initial conditions. Moreover, the effects of centrifugal forces on the dynamic pull-in behavior have been investigated using time histories and phase portraits for different angular velocities.International Journal of Non-Linear Mechanics 12/2014; · 1.35 Impact Factor -
##### Article: Uncertainty quantification of MEMS using a data-dependent adaptive stochastic collocation method

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**ABSTRACT:**This paper presents a unified framework for uncertainty quantification (UQ) in microelectromechanical systems (MEMS). The goal is to model uncertainties in the input parameters of micromechanical devices and to quantify their effect on the final performance of the device. We consider different electromechanical actuators that operate using a combination of electrostatic and electrothermal modes of actuation, for which high-fidelity numerical models have been developed. We use a data-driven framework to generate stochastic models based on experimentally observed uncertainties in geometric and material parameters. Since we are primarily interested in quantifying the statistics of the output parameters of interest, we develop an adaptive refinement strategy to efficiently propagate the uncertainty through the device model, in order to obtain quantities like the mean and the variance of the stochastic solution with minimal computational effort. We demonstrate the efficacy of this framework by performing UQ in some examples of electrostatic and electrothermomechanical microactuators. We also validate the method by comparing our results with experimentally determined uncertainties in an electrostatic microswitch. We show how our framework results in the accurate computation of uncertainties in micromechanical systems with lower computational effort.Computer Methods in Applied Mechanics and Engineering 01/2011; 200(45):3169-3182. · 2.62 Impact Factor

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