ACO-Based Scheduling of Parallel Batch Processing Machines with Incompatible Job Families to Minimize Total Weighted Tardiness.
ABSTRACT This research is motivated by the scheduling problem in the diffusion and oxidation areas of semiconductor wafer fabrication
facilities (fabs), where the machines are modeled as Parallel Batch Processing Machines (PBPM). The objective is to minimize
the Total Weighted Tardiness (TWT) on PBPM with incompatible lot families and dynamic lot arrivals, with consideration on
the sequence-dependent setup times. Since the problem is NP-hard, Ant Colony Optimization (ACO) is used to achieve a satisfactory
solution in a reasonable computation time. A number of experiments have been implemented to demonstrate the proposed method.
It is shown by the simulation results that the proposed method is superior to the common Apparent Tardiness Cost-Batched Apparent
Tardiness Cost (ATC-BATC) rule with smaller TWT and makespan, especially TWT that has been improved by 38.49% on average.
- SourceAvailable from: Lars Mönch[show abstract] [hide abstract]
ABSTRACT: In this paper, we discuss scheduling problems in semiconductor manufacturing. Starting from describing the manufacturing process, we identify typical scheduling problems found in semiconductor manufacturing systems. We describe batch scheduling problems, parallel machine scheduling problems, job shop scheduling problems, scheduling problems with auxiliary resources, multiple orders per job scheduling problems, and scheduling problems related to cluster tools. We also present important solution techniques that are used to solve these scheduling problems by means of specific examples, and report on known implementations. Finally, we summarize some of the challenges in scheduling semiconductor manufacturing operations.Journal of Scheduling 01/2011; · 0.94 Impact Factor