Efficient mixed-domain analysis of electrostatic MEMS.
IEEE Trans. on CAD of Integrated Circuits and Systems 01/2003; 22:1228-1242. pp.1228-1242
Article: Analysis of Hybrid Electrothermomechanical Microactuators With Integrated Electrothermal and Electrostatic Actuation[show abstract] [hide abstract]
ABSTRACT: The goal of this paper is to integrate electrothermal and electrostatic actuations in microelectromechanical systems (MEMS). We look at cases where these two types of actuation are intimately coupled and argue that such integrated electrothermomechanical (ETM) microactuators have more advantages than pure electrothermal or electrostatic devices. We further propose a framework to model hybrid ETM actuation to get a consistent solution for the coupled mechanical, thermal, and electrical fields in the steady state. Employing a Lagrangian approach, the inhomogeneous current conduction equation is used to describe the electric potential, while the thermal and displacement fields are obtained by solving the nonlinear heat conduction equation and by performing a large deformation mechanical analysis, respectively. To preserve numerical accuracy and reduce computational time, we also incorporate a boundary integral formulation to describe the electric potential in the medium surrounding the actuator. We show through the example of a hybrid double-beam actuator that ETM actuation results in low-voltage low-power operation that could be used for switching applications in MEMS. We also extend the same device toward bidirectional actuation and demonstrate how it may be used to overcome common problems like stiction that occur in MEMS switches.Journal of Microelectromechanical Systems 11/2009; · 2.10 Impact Factor
Article: A Lagrangian approach for quantum-mechanical electrostatic analysis of deformable silicon nanostructures[show abstract] [hide abstract]
ABSTRACT: Semiconductor mechanical components of nanoelectromechanical systems (NEMS) typically undergo deformations when subjected to electrostatic forces. Computational analysis of electrostatic NEMS requires an electrostatic analysis to compute the electrostatic forces acting on the nanomechanical structures and a mechanical analysis to compute the deformation of the nanomechanical structures. Typically, the mechanical analysis is performed by a Lagrangian approach using the undeformed position of the structures. However, the electrostatic analysis is performed by using the deformed position of the nanostructures. The electrostatic analysis on the deformed position of the nanostructures requires updating the geometry of the structures during each iteration. In this paper, based on a recently proposed hybrid BIE/Poisson/Schroinger approach, we propose Lagrangian formulations for the BIE/Poisson/Schroinger equations and solve the coupled Lagrangian BIE/Poisson/Schroinger's equations self-consistently using the undeformed position of the semiconductors to compute the charge distributions on the deformed semiconductors. The proposed approach eliminates the requirement of updating the geometry and, consequently, significantly simplifies the procedure of coupled electromechanical analysis of NEMS.Engineering Analysis with Boundary Elements 01/2006; 30:925-939. · 1.45 Impact Factor
[show abstract] [hide abstract]
ABSTRACT: A wide range of microelectromechanical systems (MEMSs) and devices are actuated using electrostatic forces. Multiphysics modeling is required, since coupling among different fields such as solid and fluid mechanics, thermomechanics and electromagnetism is involved. This work presents an overview of models for electrostatically actuated MEMSs. Three-dimensional nonlinear formulations for the coupled electromechanical fluid–structure interaction problem are outlined. Simplified reduced-order models are illustrated along with assumptions that define their range of applicability. Theoretical, numerical and experimental works are classified according to the mechanical model used in the analysis.Smart Mater. Struct. 01/2007; 16:23-31.
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