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Publications (8)
An electrostatic force microscopy (EFM) is a highly effective system for a measurement of surface voltage distribution. We have been working on the development of the EFM which enables to measure surface voltage in the range from +/-0.1 V up to +/-2 kV with a high spatial resolution better than 10 µm in diameter under atmospheric environment. The E...
A system which may be used to control, monitor and optimize an electrostatic clamp is disclosed. In one embodiment of the invention, there is a computer, a control circuit, and at least one amplifier. Also, a signal assessing circuit may be included and used to provide a sensing signal to an output signal of the control circuit. The signal assessin...
We have invented a new sensor adjacent methodology for high spatial resolution and high voltage measurement apparatus with which we are able to accomplish arbitrary voltage measurement without causing any unexpected arcing. We have introduced two new techniques, i.e. 1) continuously providing a voltage feedback to the sensor to make sure that it nu...
Experiments were conducted with an EFM (Electrostatic Force Microscope) to measure surface potential distribution on CTL (Carrier Transport Layer) having two different charge mobility characteristics. One CTL has lower charge mobility characteristic and other CTL has higher charge mobility characteristic. Four electrodes were placed on each CTL wit...
The relationship between surface resistivity and surface resistance is established and explained.
We have invented a new sensor adjacent methodology for high spatial resolution and high voltage measurement apparatus with which we are able to accomplish arbitrary voltage measurement without causing any unexpected arcing. We have introduced two new techniques, i.e. 1) continuously providing a voltage feedback to the sensor to make sure that it nu...
We have been working on the development of an Electrostatic Force Microscope (a.k.a. EFM). The EFM enables to measure surface voltage distribution with a spatial resolution of 10 μm. Although the spatial resolution is incomparably higher than any other conventional electrostatic voltmeters, it can measure voltage up to +/-1kV with extremely wide sc...
