Does anyone have experience with chromium etching? I need to etch chrome deposited on glass. Does anyone have the composition of chromium etchant?

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• 
  Andrew Rubin · King Abdullah University of Science and Technology

  Are you talking about wet or dry etching? Thanks, Andrew

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  Are you talking about wet or dry etching? Thanks, Andrew

  Jul 20, 2012
• 
  Ravi Kumar Chintalapudi · University of Hyderabad

  Its wet etching...

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  Its wet etching...

  Jul 21, 2012
• 
  Andrew Rubin · King Abdullah University of Science and Technology

  You can use Chromiun Mask Etchant N1 from Technic France. The company address is: 15 rue de la Monjoie BP79 F-93212 Saint Denis La Plaine CEDEX tel: 0149465100

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  You can use Chromiun Mask Etchant N1 from Technic France. The company address is: 15 rue de la Monjoie BP79 F-93212 Saint Denis La Plaine CEDEX tel: 0149465100

  Jul 25, 2012
• 
  Catherine Rice

  Chromium can be etched with 6 wt % nitric acid and 16 wt % ceric ammonium nitrate in water.

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  Chromium can be etched with 6 wt % nitric acid and 16 wt % ceric ammonium nitrate in water.

  Jul 26, 2012
• 
  Ravi Kumar Chintalapudi · University of Hyderabad

  Thank you Catherine. Any idea of the etch rate?

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  Thank you Catherine. Any idea of the etch rate?

  Jul 26, 2012
• 
  Catherine Rice

  I do not have personal knowledge but here is a reference: http://engineering.tufts.edu/microfab/index_files/SOP/ChromiumEtch_SOP.pdf

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  I do not have personal knowledge but here is a reference: http://engineering.tufts.edu/microfab/index_files/SOP/ChromiumEtch_SOP.pdf

  Jul 26, 2012
• 
  Gianluca Grenci · National University of Singapore

  Dear All, In producing chromium mask for optical lithography, I use this wet etching, which is veryu good with optical resist: 35 ml CH3COOH 600 ml H20 200 g (NH4)2Ce(NO3)6 You don't need to heat, the etching rate is 60-100 nm/min (depending on the stirring rate) Hope this will help you

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  Dear All,
  
  In producing chromium mask for optical lithography, I use this wet etching, which is veryu good with optical resist:
  
  35 ml CH3COOH
  600 ml H20
  200 g (NH4)2Ce(NO3)6
  
  You don't need to heat, the etching rate is 60-100 nm/min (depending on the stirring rate)
  
  Hope this will help you

  Aug 15, 2012
• 
  Zoraida Aguilar · University of Arkansas

  You can purchase a chrome etchant from Microchemicals, Sigmaaldrich, Union Etchants, or from other vendors. Make sure to read the product specification sheets very carefully and follow the manufacturer's recommendations on how to use the product. They will also have a recommendation on etch rate and the suitable photoresists (positive and/or negative). They usually test the products multiple times before they release it to the market. Once you are familiar with your projects' needs, you can prepare your own chrome etchant to save on your financial resources. But, take note that chrome etchants are not expensive to begin with so it may be best to purchase the commercially available ones.

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  You can purchase a chrome etchant from Microchemicals, Sigmaaldrich, Union Etchants, or from other vendors. Make sure to read the product specification sheets very carefully and follow the manufacturer's recommendations on how to use the product. They will also have a recommendation on etch rate and the suitable photoresists (positive and/or negative). They usually test the products multiple times before they release it to the market. Once you are familiar with your projects' needs, you can prepare your own chrome etchant to save on your financial resources. But, take note that chrome etchants are not expensive to begin with so it may be best to purchase the commercially available ones.

  Oct 14, 2012
• 
  Ravi Kumar Chintalapudi · University of Hyderabad

  Thank you very much Zordia Aguilar for the suggestion. I have achieved my goal. Thanks a lot.

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  Thank you very much Zordia Aguilar for the suggestion. I have achieved my goal. Thanks a lot.

  Nov 26, 2012